Epitaxy
Epitaxy
The Epitaxy recharge center consists of three deposition tools for thin film research as well as a high resolution x-ray diffractometer for thin film characterization. Equipment in recharge center: Nitride Sputter System (PVD Products), Oxide Pulsed Laser Deposition (PVD Products), High resolution x-ray diffractometer HRXRD (PANalytical), chemical vapor deposition, Laser annealing (Lambda Physik), Laser lift-off (Lambda Physik).
- Category: Discovery Park
- Recharge: Yes
- Accessible to non-Purdue users: Yes
- Contact: Ron Reger